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RWD Wafer Robot
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Semiconductor Subsystem
Wafer Robot
S Series Wafer Robot
RWD Wafer Robot
RWD Wafer Robot
Feature
Direct drive motor design, repeatability ±0.1mm.
Repeatability
±0.1
Z axis stroke
Max.
500
Payload
2-3
kg
APPLICATION
Semiconductor
LED
LCD
IC
Automated optical inspection(AOI)
Automation industry
HIWIN Technical Support
Full Specs
Product Selection